Chinese chipmakers will be able to produce chips at the 7nm, 5nm and eventually 3nm technology levels using DUV tools – better than limits set by Washington.
However, chipmakers using the technique will suffer ever-worse yields, making that a demonstration of engineering prowess but economically unviable
GOVERNMENT SUBSIDIES!
Are you referring to the Chinese, American or Dutch government to whom the subsidies will be offered?
The answer is literally the first word of the part I quoted.